SV NEO D16-65
16--65m3/h
8*10—3
DIVAC L
0.6 m3/h
≤ 8 mbar
TRIVAC4-65B
4.2 -65m3/h
< 2 x 10-3 mbar
TRIVAC C8-60
8m3/h~60m3/h
10-4mbar c/s